Electronic Resource
Bjorkholm, J.E.
;
Bokor, J.
;
Eichner, L.
;
[et al.]
Freeman, R.R.
;
Gregus, J.
;
Jewell, T.E.
;
Mansfield, W.M.
;
MacDowell, A.A.
;
White, D.L.
;
Windt, D.L.
;
Tennant, D.M.
;
Raab, E.L.
;
Szeto, L.H.
;
O'Malley, M.L.
;
Wood, O.R.
;
Waskiewicz, W.K.
;
... and further 1
Amsterdam
:
Elsevier
Microelectronic Engineering
13 (1991), S. 243-250