Publication Date:
2016-06-16
Description:
A self-biased MEMS magnetic sensor array with ferromagnetic-piezoelectric composites has been fabricated and characterized. The array with two Quartz-Nickel-Metglas cantilevers with nano-tesla sensitivity was fabricated by MEMS processes including silicon-quartz low temperature bonding, quartz wafer thinning, and electroplating of thick nickel thin films. Under self-biasing due to magnetization grading of ferromagnetic layer, magnetoelectric coefficients of 6.6 and 5.6 V/cm Oe and resolutions of ∼0.58 and ∼0.75 nT are obtained at the mechanical resonant frequencies of 191.5 and 184.8 Hz for the two sensors in the array, respectively. Such arrays have the potential for applications in biomagnetic imaging technologies including magneto-cardiography.
Print ISSN:
0003-6951
Electronic ISSN:
1077-3118
Topics:
Physics
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