PACS: 68.35.-p; 68.35.Bs; 68.90.+g; 81.05.Zx
Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Abstract. After aging at room temperature for several months W/C multilayers (20 periods, single layer thicknesses in the nanometer range) grown on Si-(111) substrates by pulsed laser deposition (PLD) developed homogeneously wrinkled surfaces. Their structures were studied by optical microscopy, atomic force microscopy and X-ray diffractometry. Typical dimensions of debonded areas are some 100 μm in length, about 40 μm in width and 2–3 μm in height. The formation of wrinkles is accompanied by an increase in the free surface by 1–2%. Stress relaxation is considered the driving force of this phenomenon.
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