AIP Digital Archive
Electrical Engineering, Measurement and Control Technology
Glancing angle extended x-ray absorption fine structure (EXAFS) has been applied to study structure, diffusion, and short-range order in ultrahigh vacuum evaporated C-Er bilayer and Er/C multilayer films, which provide a model for the influence of microstructure in x-ray multilayer reflectors. A lack of crystallinity in the C-Er bilayers and Er/C multilayers is indicated by x-ray diffraction. EXAFS spectra of C-Er bilayers and Er/C multilayers are substantially different from that of a 6000-A(ring) erbium film, which shows local structure similar to pure erbium. For bilayers and multilayers a local ErC2-like environment has been found, even though only a small concentration of carbon is thought to have diffused into erbium layers. It is possible that carbon diffusion and Er—C bond formation prevent the crystallization of locally ordered hcp erbium metal clusters. That low Z atoms can diffuse into the high Z metal layers and change their structure appears to be a common feature for x-ray multilayer mirrors.
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