ISSN:
1432-0630
Keywords:
PACS: 68.55JR; 81.15Gh
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. (001) textured PbTiO3 thin films have been deposited on (001) redoping n-Si substrates by metalorgnic chemical vapor deposition (MOCVD) under reduced pressure, and the film ferroelectricity has been measured using the substrate as bottom electrode directly. Besides this investigation, a set of analysis including AFM surface morphology, SEM cross section morphology, electron-probe element analysis, XRD θ-2θ scan and high temperature X-ray diffraction have been carried out to study the microstructure and phase transition process of the PbTiO3 thin film.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390050402
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