ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Beamline 2-BM at the Advanced Photon Source has been fully commissioned for a range of x-ray microtechniques including micromachining, microtomography, and microcharacterization by scattering and fluorescence. The beamline has been designed and constructed to provide a highly collimated beam with great flexibility in tuning the energy bandpass. To achieve this, the beamline incorporates two mirrors, filters, and two monochromators allowing selection of energy in the range of 3–33 keV with a bandpass in the range of 1–1000 eV. The endstation includes precision instrumentation for deep x-ray lithography, x-ray microtomography, x-ray imaging, x-ray optics characterization, and the development of techniques for high-throughput x-ray microcharacterization of libraries of samples. The various experimental systems are controlled and integrated in the station to allow for the flexibility of techniques, while improving efficiency of use. We describe in detail the beamline design, capabilities, and endstation instrumentation. © 2002 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1448165
Permalink