ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Nano hot or thermal embossing has many advantages of comparatively few process steps,simple operation, relatively low tooling cost and high replication accuracy for small features.However, because of its long processing time, it has been known as being less competitive thannano injection molding. In order to overcome the weakness of long processing time, the high speednano hot embossing system has been developed and its characteristics were investigated. Nanopatternedstampers made of Ni and Si were fabricated by the laser mastering and electroformingprocess and the DRIE and LPCVD or thermal oxidation process respectively. In order to make theprocessing time shorter and get relatively higher aspect ratio nano/micro features, especially, thetemperatures of the molds were controlled actively and precisely during the embossing process.Through various experiments, nano embossing parameters, such as temperature, pressure andprocessing time, are optimized and the high aspect ratio nano features could be obtained
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.925.pdf
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