ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The results of theoretical and experimental investigations of dense plasma source resonantly excited by helicon wave are presented. Driven by a single-loop low-voltage ((approximately-equal-to)300 V) antenna, a source generates a plasma of density up to 5×1011 cm−3 at gas pressures 0.5–20 mTorr, operates at magnetic fields 〈100 Gs, and produces low-energy ion fluxes (〈60 eV) with current densities up to 7 mA/cm2 and 3.5% nonuniformity within a diameter 10 cm. A high-efficiency helicon source originates in a special kind of "resonance'' wave discharge, where a sharp increase of plasma resistance occurs near the helicon wave dispersion branches.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144963
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