ISSN:
1618-2650
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Summary Prototypes of Ni-C multilayers (up to 40 periods of typically 5 nm thickness) have been prepared by laser pulse vapour deposition (LPVD) and analyzed by a variety of methods. The work showed near normal X-ray reflectivities of typically 5%; an interface roughness ranging from 〈1 Å (determined by image processing of TEM micrographs) to 5 Å (determined by simulation of X-ray diffraction); a compensation for the roughness component that is caused by the substrate surface and impurity concentrations 〈1 at.−% in layers and in interfacial regions. X-ray diffraction, transmission electron microscopy and image processing have been successfully used for the investigation of the interfacial regions, whereas depth profiling methods that involve sputtering (SNMS and AES) can not provide resolution below 10 Å.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00321375
Permalink