ISSN:
1432-1130
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract A micro chip element with an integrated flow channel and thin film thermopiles was developed in order to realize a micro calorimeter for small volumes in a flow arrangement. The flow channel consists of two inlets, a mixing region, a measurement region, and one outlet. Thermopiles of BiSb/Sb thermocouples were used as thermal transducers because of their extraordinary high thermopower. A thin film heater of a NiCr alloy was integrated in order to yield the possibility of internal electrical calibration. In addition, this heater can be used for thermal modulation of the whole measurement system. The calorimeter was prepared using vacuum evaporation, PECVD and magnetron sputtering for thin film deposition and photolithography as well as chemical wet etching for microstructuring. The function of the device was tested to neutralize 400 nmole, 100 nmole and 10 nmole NaOH by H2SO4.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s002160050491
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