Publication Date:
2016-05-24
Description:
We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-μm-range, digitally controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.
Print ISSN:
0034-6748
Electronic ISSN:
1089-7623
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Permalink