PACS: 77.55; 07.07.D; 92.60.J
Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Abstract. The humidity sensitive properties of carbon nitride (CNx) films deposited by two methods, inductively coupled plasma chemical vapour deposition utilizing transport reactions and pulsed laser deposition combined with an rf discharge, have been investigated. For this purpose capacitance humidity sensors with a CNx detecting element have been fabricated and tested. Fast and significant responses toward moisture are registered by the changes of the electrical parameters. The CNx films sensing mechanism has been discussed. The results obtained show unambiguously that CNx films appear to be a promising candidate as a humidity sensitive element in up-to-date electronic noses.
Type of Medium: