ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Circular zone plates for hard x rays, fabricated by dc planar magnetron sputtering, have been characterized using monochromatized synchroton x rays. The zone plates consisted of either 5 or 20 pairs of altenating WSi2 and C layers. The minimum focal spot size attained was less than 3 μm× 10 μm in the vertical and horizontal directions, respectively. The efficiency of the zone plate with 20 layer pairs was determined to be about 4.5%. An x-ray transmission image of a No. 2000 mesh Cu grid and an x-ray fluorescence image of a patterned Co thin film were measured, and it was demonstrated that a high-resolution image could be obtained with the present zone plate. The possibility of implementing the phase zone plate in hard x-ray range is considered.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1140974
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