ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Using Hall ion source assisted MF twin targets unbalanced magnetron sputtering, series ofTi/TiN, Ti/TiN/Ti(C,N) and Ti/TiN/Ti(C,N)/TiC hard anti-wear films are deposited on differentmaterials like stainless and high speed steels by changing atmosphere, bias mode, sputtering and ionbeam assisted currents. The color, crystal structure, hardness and binding force of film are tested andanalyzed, respectively. Experimental results show that color of film is sensitive to atmosphere, slightchange of atmosphere can influence the coating’s color seriously. The preferred orientation ofTi(C,N) films prepared by MF twin targets unbalanced magnetron sputtering has no obvious changecompared with the film deposited by other PVD technologies. The substrate material has greatinfluence on film’s hardness, binding energy and surface modification. The application of Hallcurrent can effectively improve the binding force between film and substrate
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/16/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.546-549.1729.pdf
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