ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The optical-fiber alignment system is a critical role on micro/nano precision engineering.In this paper, the design and fabrication of a novel, six-axis compliant nano-stage which uses flexurehinge and negative Poisson’s Ratio is presented. Every single axis is a designed planar geometry, so itis easily fabricated via laser cutting processes that enable cost down to achieve batch products. Thematerial of six-axis mechanism is aluminum. The micromechanism consists of six trapeziformdisplacement structures and two hexagonal plates which are on the top and bottom. The displacementstructures includes of a signal layer flexure hinge toggle mechanism stage and asymmetricalmulti-layer flexure hinge toggle mechanism stage. The computer simulation of the transferringbehavior was performed with a commercial package, named SolidWorks ANSYS@. The model statesof stress, strain and the displacement of ratio can be estimated. The experiment was carried out withPiezoelectric(PZT) actuators and LVDT which drives and measures the displacement. Comparison ofthe simulation and experimental result between the single-axis and six-axis stage are presented. Theresults shown that the displacement of ratio is 32 times as the single-axis structures. The systemmaximum displacement of vertical translation, horizontal translation, tilt angle and rotational angle is50 µm, 50 µm, 0.5° and 0.5°. In experimental, the results not only demonstrate that thismicromechanism of flexure hinge and negative Poisson’s Ratio increases the displacement of ratioand reduces the size of system, but can also be applied on the optical-fiber alignment system
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.141.pdf
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