Wiley InterScience Backfile Collection 1832-2000
Chemistry and Pharmacology
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Thermally-reacted poly(methacrylamide) degrades under high-energy irradiation. It has a sensitivity of 2-3 × 10-7 C/cm2 when exposed to 10 KV electrons. The resist is thermally stable to 330°C and has a high glass transition temperature, 180 200°C. It may be used for the lift-off process and ion-milling.
Type of Medium: