Keywords:Data format; FIB; Microfabrication; Transformation
Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Data format transformation is very important for 2D and 3D nanofabrication of FIB technology because only one map file format with the extension name XBM is available in FIB workstation software. This XBM format has only a few drawing functions which limits the bitmap editor when creating a complicated map file such as a spiral or a gear. Therefore, it is necessary to make use of specialised software which can transfer map files created by other drawing software such as AutoCAD and CorelDRAW into the FIB machine in the required XBM map file format. The method of transferring a map file created by AutoCADR14 into the XBM format file is discussed in detail in this paper. It is available for practical FIB micromanufacturing.
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