ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Micro-Electromechanical Systems (MEMS) has been regarded as one of the mostpromising technologies for the 21st Century. Recently, some highlight areas attract great attentionincluding Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. Thestate of arts on MEMS research in China is briefly introduced and research activities inNorthwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexiblesubstrate for MEMS integration, micro mirror, micro battery and three dimension measurement aredemonstrated
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.532-533.181.pdf
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