ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    Friction-Based 〈i〉In Situ 〈/i〉Endpoint Detection of Copper CMP Process (2008)
    s.l. ; Stafa-Zurich, Switzerland
    Advanced materials research Vol. 53-54 (July 2008), p. 125-130 
    Details
    ISSN: 1662-8985
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Chemical mechanical polishing (CMP) has been extensively used in the integrate circuit(IC) manufacturing industry as a widely accepted global planarization technology, accurate in situendpoint detection of CMP process can reduce the product variance, significantly improve yield andthroughput. A CMP in situ endpoint detection system, which measured the friction and downforceduring CMP process using a specially designed three-axis strain gauge force sensor, was developed.The frictional transition from copper (Cu) to tantalum (Ta) barrier as well as Ta barrier to silicondioxide (SiO2) dielectric was detected during CMP process. The experimental results showed thatthe change of friction could be detected when the polished material changed. The developed CMP insitu endpoint detection system is feasible for 300 mm and 450 mm copper CMP process
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/41/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.53-54.125.pdf
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    A Method for Grinding Mode Identification in Grinding of Silicon Wafers (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Advanced materials research Vol. 24-25 (Sept. 2007), p. 255-260 
    Details
    ISSN: 1662-8985
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: A new non-destructive method was developed to identify the grinding mode of siliconwafers, which is based on the information of subsurface cracks extracted from the surfacetopography of the ground silicon wafers measured with a 3D surface profiler. We examinedextensive measurement data of the surface topography of silicon wafers processed by single graingrinding or real grinding operation, and our results show that the information about median crackscould be captured if the lateral sampling interval of the 3D surface profiler is small enough, even ifthe grain depth of cut is below 20nm. If the maximum valley of the measured surface topography isapproximately equal to the grain depth of cut, surface formation will be under ductile mode,whereas, if the maximum valley is several times larger than the grain depth of cut, surfaceformation will be under brittle mode. According to this criterion, silicon wafers ground by ductilemode or brittle mode could be identified rapidly and conveniently. Experimental validation showsthat this method is accurate
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/39/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.24-25.255.pdf
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 3
    Electronic Resource
    Electronic Resource
    Experimental Investigation of Brittle to Ductile Transition of Single Crystal Silicon by Single Grain Grinding (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 329 (Jan. 2007), p. 433-438 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Grinding of single crystal silicon may be achieved by two modes of material removal:ductile mode and brittle mode. Knowing of the brittle to ductile transition point at which the grindingprocess changes from the brittle mode to ductile mode is critically important for the realization ofductile mode grinding. This paper uses a new single grain diamond grinding method developedrecently by the authors to investigate the brittle to ductile transition during grinding of single crystalsilicon in all around. The results indicate that there exist four stages of brittle to ductile transition asthe depth of cut is reduced: firstly, the surface cracks outside the grinding groove disappeared,secondly[removed info]cracks on the bottom of the groove disappeared, then the lateral cracks ceased in thesubsurface region, and finally the median crack is suppressed beneath the grooves. It is not until thedepth of cut reaches the last transition point that a crack-free groove can be produced, therefore, thelast transition stage is decisive. The critical depth of cut delineating the brittle to ductile transitionpoint derived based on this criterion is 40 nanometers, which is much lower than that based on surfacecracks
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.329.433.pdf
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 4
    Electronic Resource
    Electronic Resource
    Development of a Drop-On-Demand Micro Dispensing System (2006)
    s.l. ; Stafa-Zurich, Switzerland
    Materials science forum Vol. 505-507 (Jan. 2006), p. 25-30 
    Details
    ISSN: 1662-9752
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: This paper presents the development a drop-on-demand micro-dispensing system on which functional devices can be directly printed in a layer-by-layer manner that is commonly used in Rapid Prototyping and Manufacturing processes. The principle is to form micro droplets on substrate that requires accuracy and consistency with the ability to build 3D model. It requires heating of material to a desired temperature and viscosity which allows the piezoelectric the ability to pump out. In order to build a 3D model, a basic XYZ-axis gantry, motion controller and dispenser with temperature controller were developed and integrated. Experiments with differentmaterials were carried out to understand the influences of the dispensing parameters on continuous frequency output. The results hold attractive potential for the use of this system in fabricating 3D models which meet the accuracy and resolution needs for various industry applications
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/11/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.505-507.25.pdf
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 5
    Electronic Resource
    Electronic Resource
    Luminance Characterization of La〈sub〉3〈/sub〉Ga〈sub〉5〈/sub〉SiO〈sub〉14〈/sub〉 Thin Films by Sputtering Deposition (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Materials science forum Vol. 539-543 (Mar. 2007), p. 3514-3519 
    Details
    ISSN: 1662-9752
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: La3Ga5SiO14 (LGS) thin films were grown on (200)-textured MgO buffer layer, whichwas deposited on the silicon wafer, by sputtering at 600°C. These thin films were annealed andtransformed form amorphous to the LGS crystalline phase with the heat treatment temperaturehigher than 1150°C. It was found that the films with LGS crystalline phase showed luminescentcharacterization whereas the LGS sintered solids did not. The emission peak of the films wasfound to be 438 nm under the excited light of λex=300nm. Effects of annealed temperature on theluminescent properties of the thin films are investigated. The relationship between the mechanismof luminescence and the crystalline structure of the LGS films are discussed
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.539-543.3514.pdf
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 6
    Electronic Resource
    Electronic Resource
    Equivalence of voltage bias and geometric waveguide design in directional couplers (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 68 (1996), S. 2775-2777 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Using Poincaré coordinates we show that any relative amplitude and phase between the two modes of a directional coupler can be obtained through varying a single electrode voltage and by selecting the correct length for the coupling region. Alternatively, curved waveguide sections can be employed to accomplish the same feat without applied voltage, which we demonstrate using beam propagation simulations. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.116603
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 7
    Electronic Resource
    Electronic Resource
    X-ray characterization of strain relaxation in InGaAs/GaAs strained-layer superlattices (1993)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 63 (1993), S. 3327-3329 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Strain relaxed InGaAs/GaAs superlattices grown on GaAs(001) substrate by molecular beam epitaxy have been studied by means of double-crystal x-ray diffractometry. Theoretical simulations of the rocking curves were successfully performed by taking into account the relaxation mechanism, the tilt between the multilayer and the substrate, and the peak broadening effects. It was found that in our sample the misfit strain is relaxed on the multilayer/substrate interface. This leads to the formation of misfit dislocations on the interface with a mean linear density about 9×104 cm−1 and a tilt of 325 s. toward the [010] direction between the multilayer and the substrate.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.110190
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 8
    Electronic Resource
    Electronic Resource
    Tandem PDZ repeats in glutamate receptor–interacting proteins have a novel mode of PDZ domain–mediated target binding (2003)
    [s.l.] : Nature Publishing Group
    Nature structural biology 10 (2003), S. 972-978 
    Details
    ISSN: 1072-8368
    Source: Nature Archives 1869 - 2009
    Topics: Biology , Medicine
    Notes: [Auszug] The interaction of the glutamate receptor subunits 2 and 3 (GluR2/3) with multi-PDZ domain glutamate receptor–interacting protein (GRIP) is important for the synaptic trafficking and clustering of the receptors. Binding of GluR2/3 to GRIP requires both the fourth and fifth PDZ domains (PDZ4 ...
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1038/nsb992
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 9
    Electronic Resource
    Electronic Resource
    Direct writing of chitosan scaffolds using a robotic system (2005)
    Bingley : Emerald
    Rapid prototyping journal 11 (2005), S. 90-97 
    Details
    ISSN: 1355-2546
    Source: Emerald Fulltext Archive Database 1994-2005
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Purpose - This paper aims to present a novel rapid prototyping (RP) fabrication methods and preliminary characterization for chitosan scaffolds. Design - A desktop rapid prototyping robot dispensing (RPBOD) system has been developed to fabricate scaffolds for tissue engineering (TE) applications. The system is a computer-controlled four-axis machine with a multiple-dispenser head. Neutralization of the acetic acid by the sodium hydroxide results in a precipitate to form a gel-like chitosan strand. The scaffold properties were characterized by scanning electron microscopy, porosity calculation and compression test. An example of fabrication of a freeform hydrogel scaffold is demonstrated. The required geometric data for the freeform scaffold were obtained from CT-scan images and the dispensing path control data were converted form its volume model. The applications of the scaffolds are discussed based on its potential for TE. Findings - It is shown that the RPBOD system can be interfaced with imaging techniques and computational modeling to produce scaffolds which can be customized in overall size and shape allowing tissue-engineered grafts to be tailored to specific applications or even for individual patients. Research limitations/implications - Important challenges for further research are the incorporation of growth factors, as well as cell seeding into the 3D dispensing plotting materials. Improvements regarding the mechanical properties of the scaffolds are also necessary. Originality/value - One of the important aspects of TE is the design scaffolds. For customized TE, it is essential to be able to fabricate 3D scaffolds of various geometric shapes, in order to repair tissue defects. RP or solid free-form fabrication techniques hold great promise for designing 3D customized scaffolds; yet traditional cell-seeding techniques may not provide enough cell mass for larger constructs. This paper presents a novel attempt to fabricate 3D scaffolds, using hydrogels which in the future can be combined with cells.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1108/13552540510589458
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 10
    Electronic Resource
    Electronic Resource
    Autoinhibition of X11/Mint scaffold proteins revealed by the closed conformation of the PDZ tandem (2005)
    [s.l.] : Nature Publishing Group
    Nature structural & molecular biology 12 (2005), S. 722-728 
    Details
    ISSN: 1545-9985
    Source: Nature Archives 1869 - 2009
    Topics: Biology , Medicine
    Notes: [Auszug] Members of the X11/Mint family of multidomain adaptor proteins are composed of a divergent N terminus, a conserved PTB domain and a pair of C-terminal PDZ domains. Many proteins can interact with the PDZ tandem of X11 proteins, although the mechanism of such interactions is unclear. Here we show ...
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1038/nsmb958
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...