ISSN:
1572-8986
Keywords:
Plasma deposition
;
thin films
;
organometallics
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract The plasma treatment of vapors containing organometallic compounds (of Pd, Ni, Co, Sn, Au) and various alkenes has been used to prepare thin films, the composition and electrical resistivity of which could be varied over a wide range.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01016927
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