Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
75 (1999), S. 1110-1112
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We present prism coupling measurements on AlxGa1−xAs native oxides showing the dependence of refractive index on composition (0.3≤x≤0.97), oxidation temperature (400≤T≤500), and carrier gas purity. Index values range from n=1.490 (x=0.9, 400 °C) to 1.707 (x=0.3, 500 °C). The oxides are shown to adsorb moisture, increasing their index by up to 0.10 (7%). Native oxides of AlxGa1−xAs (x≤0.5) have index values up to 0.27 higher and are less hygroscopic when prepared with a small amount of O2 in the N2+H2O process gas. The higher index values are attributed to a transition from a hydroxide to a denser (AlxGa1−x)2O3 oxide phase. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.124612
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