ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Infrared emission radiometry was used as a noncontact temperature probe with a tens of micron spatial resolution for monitoring laser-induced chemical vapor deposition (LCVD). With appropriate calibration of the emissivity, a temperature of 255±15 °C was measured during gold LCVD from dimethylhexafluoroacetylacetonate gold (III). Equivalent deposition temperatures were calculated for both continuous and modulated laser illumination. Depending on the deposition conditions, material deposited with a modulated laser beam varied from notably worse (due to stress cracking) to notably better (more uniform growth morphology) than material deposited with continuous laser illumination.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1143267
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