Polymer and Materials Science
Wiley InterScience Backfile Collection 1832-2000
Extracting chemical information from Auger data is an arduous task, particularly when signals result from the contribution of several components. The numerical method known as factor analysis (FA) can be powerful in enhancing the presence of poorly visible lineshape contributions and in quantification problems. Nevertheless FA is still little employed in Auger data handling.This paper deals with applications of Auger data factor analysis to the study of solid state reaction at oxide-oxide and metal-silicon interfaces.Attention is focused on the details of data pre-processing, observation of abstract solutions and physical significance of results.
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