ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    X-ray photoelectron spectroscopy and surface charge build-up used to study residue on aluminum contacts on integrated circuitsThis work was supported in part by a grant from General Electric. (1989)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 14 (1989), S. 39-45 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: X-ray photoemission induced surface charge build-up with a charge control screen and small spot analysis was used to study processing residue layers deposited on aluminum-silicon metallization as found in high aspect ratio via regions on silicon integrated circuits. Chemically vapor deposited silicon dioxide on Al: 1% Si metallization is commonly found in double level metallization of intergrated circuits. An interdigitated fine-line test pattern with lines ranging from 500 nm to 2000 nm and variable spacing was used to simulate a typical integrated circuit structure. X-ray photoemission studies of processed test circuits have led to the following conclusions. Line patterns CHF3 plasma etched into 800 nm SiO2 to expose Al were found to be contaminated with a dominant carbide and a minor oxyfluoride compound. Both Al carbides and Al oxyfluorides are non-volatile compounds and hence are not readily removed during plasma etching or ashing. This surface layer is deposited by a combination of fluorine in the plasma interacting with the aluminum surface, side wall deposition of carbon from the photoresist, and ion induced mixing of the surface region. Deposits found on similarly processed planar structures were contaminated with Al oxyfluoride and no detectable amount of carbide. Back-scattered Al(OF)x was observed on the SiO2 surface due to the plasma ashing photoresist removal step.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740140110
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    facet.materialart.
    Unknown
    Pods: a Powder Delivery System for Mars In-situ Organic, Mineralogic and Isotopic Analysis Instruments (2005)
    In:  CASI
    Details
    Publication Date: 2017-10-02
    Description: Many Mars in situ instruments require fine-grained high-fidelity samples of rocks or soil. Included are instruments for the determination of mineralogy as well as organic and isotopic chemistry. Powder can be obtained as a primary objective of a sample collection system (e.g., by collecting powder as a surface is abraded by a rotary abrasion tool (RAT)), or as a secondary objective (e.g, by collecting drill powder as a core is drilled). In the latter case, a properly designed system could be used to monitor drilling in real time as well as to deliver powder to analytical instruments which would perform complementary analyses to those later performed on the intact core. In addition, once a core or other sample is collected, a system that could transfer intelligently collected subsamples of power from the intact core to a suite of analytical instruments would be highly desirable. We have conceptualized, developed and tested a breadboard Powder Delivery System (PoDS) intended to satisfy the collection, processing and distribution requirements of powder samples for Mars in-situ mineralogic, organic and isotopic measurement instruments.
    Keywords: Instrumentation and Photography
    Type: Lunar and Planetary Science XXXVI, Part 18; LPI-Contrib-1234-Pt-18
    Format: application/pdf
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    NASA TECHNICAL REPORTS
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...