ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The breakdown voltage of a lead borosilicate glass used to passivate ‘mesa’-channels in silicon chips is considerably lowered by the chemical treatments required by the fabrication flow chart. Surface analysis and near-surface analysis of the glass samples shows that the chemical etching depletes both surface and near-surface regions of the glass of Al, B and Pb. Contemporaneously the glass surface becomes O- and H-rich with respect to the untreated samples. This is consistent with a mechanism based upon the formation of a silanol-rich surface which lowers the breakdown voltage.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740100703
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