All Library Books, journals and Electronic Records Telegrafenberg

feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

  • 1
    Publication Date: 2016-12-02
    Description: A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach, the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspended on top of a polysilicon resistive heater. The ferromagnetic elements consist of electroplated Nickel (Ni) with minor Iron (Fe) impurities. The electro-thermo-mechanical heating phenomenon is simulated for design purposes. The magnetization of micro-resonators with and without magnetic annealing is measured. The resulting magnetic property enhancement is illustrated by hysteresis (M-H) loop variations.
    Print ISSN: 0003-6951
    Electronic ISSN: 1077-3118
    Topics: Physics
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...