ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
In this paper, a new method to fabricate various microstructures on thermoplastics by softlithography is demonstrated. Varied line width and varied line depth microstructures that arefrequently used in micro optical products, are obtained by micromolding with simple pattern stamps.This has not been reported previously. In the new method, the variations of the line widths and depthscan be adjusted by changing the side shape and the curvature of the stamp. Factors, such astemperature, pressure and the degree of crystallinity on the product qualities are analyzed. Resultsshow that besides suitable temperature and pressure, which are important for obtaining consistentmicrostructures; lower crystallinity can also help for better product qualities. Optical, SEM and AFManalyses show the new method can fabricate varied line width and varies line depth microstructureswith desired accuracy and features. The method proposed in this work may find potential applicationsin producing micro products in areas such as sensors, biochips and non-linear optical devices
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.532-533.685.pdf
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