Publication Date:
2018-06-08
Description:
This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.
Type:
Symposium on Design, Test, Integration, and Packaging Proceeding CAD, Design and Test Conference; Cannes-Mandelieu; France
Format:
text
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