Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
83 (1998), S. 1702-1704
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Carbon nitride films were prepared using an electron cyclotron resonance enhanced chemical vapor deposition apparatus. A two-step mode was adopted in which a diamond layer was first deposited onto the substrate (Si or Mo), and then the carbon nitride films were grown. Detailed x-ray photoelectron analyses show that the carbon and nitrogen atoms have formed a nonpolar covalent bond. The nitrogen concentrations in the films remain unchanged when the substrate temperatures vary from 100 to 700 °C, which suggests that a stable phase has formed. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.366887
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