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  • 1
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 100-102 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have used the extreme sensitivity of electron tunneling to variations in electrode separation to construct a novel, compact displacement transducer. Electrostatic forces are used to control the separation between the tunneling electrodes, thereby eliminating the need for piezoelectric actuators. The entire structure is composed of micromachined silicon single crystals, including a folded cantilever spring and a tip. Measurements of displacement sensitivity and noise are reported. This device offers a substantial improvement over conventional technology for applications which require compact, highly sensitive transducers.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 59 (1991), S. 1820-1822 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The pneumatic infrared detector [M. J. E. Golay, Rev. Sci. Instrum. 18, 347 (1947)] uses thermal expansion of a gas to detect infrared radiation. We have designed a detector based on this principle, but which is constructed entirely from micromachined silicon, and uses an electron tunneling displacement transducer to detect the expansion of the gas. The design, fabrication, and characterization of the first prototype sensor are described. Its sensitivity is competitive with the best available uncooled infrared detectors.
    Type of Medium: Electronic Resource
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  • 3
    Publication Date: 1991-10-07
    Print ISSN: 0003-6951
    Electronic ISSN: 1077-3118
    Topics: Physics
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  • 4
    Publication Date: 1991-01-07
    Print ISSN: 0003-6951
    Electronic ISSN: 1077-3118
    Topics: Physics
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  • 5
    Publication Date: 2011-08-19
    Description: The extreme sensitivity of electron tunneling to variations in electrode separation has been used to construct a novel, compact displacement transducer. Electrostatic forces are used to control the separation between the tunneling electrodes, thereby eliminating the need for piezoelectric actuators. The entire structure is composed of micromachined silicon single crystals, including a folded cantilever spring and a tip. Measurements of displacement sensitivity and noise are reported. This device offers a substantial improvement over conventional technology for applications which require compact, highly sensitive transducers.
    Keywords: INSTRUMENTATION AND PHOTOGRAPHY
    Type: Applied Physics Letters (ISSN 0003-6951); 58; 100-102
    Format: text
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  • 6
    facet.materialart.
    Unknown
    In:  Other Sources
    Publication Date: 2011-08-19
    Description: The recent development of Scanning Tunneling Microscopy technology allows the application of electron tunneling to position detectors for the first time. The vacuum tunnel junction is one of the most sensitive position detection mechanisms available. It is also compact, simple, and requires little power. A prototype accelerometer based on electron tunneling, and other sensor applications of this promising new technology are described.
    Keywords: INSTRUMENTATION AND PHOTOGRAPHY
    Type: British Interplanetary Society, Journal (ISSN 0007-084X); 42; 474-477
    Format: text
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  • 7
    facet.materialart.
    Unknown
    In:  Other Sources
    Publication Date: 2011-08-19
    Description: New methods have been developed to implement position sensors based on electron tunneling. The electron tunneling methods enable position to be detected with sub-Angstrom resolution using a compact mechanical structure and simple electronic control elements. A prototype accelerometer is the first sensor based on these principles; it shows reliable operation with a noise-limited sensitivity and a bandwidth of approximately 3 kHz. Based on these results, it is expected that tunnel sensors optimized for many applications will enable an entirely new class of sensors to be developed.
    Keywords: INSTRUMENTATION AND PHOTOGRAPHY
    Type: Sensors and Actuators (ISSN 0250-6874); 19; 201-210
    Format: text
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  • 8
    Publication Date: 2011-08-24
    Description: The paper describes the design, fabrication, and characteristics of a novel infrared detector based on the principle of Golay's (1947) pneumatic infrared detector, which uses the expansion of a gas to detect infrared radiation. The present detector is constructed entirely from micromachined silicon and uses an electron tunneling displacement transducer for the detection of gas expansion. The sensitivity of the new detector is competitive with the best commercial pyroelectric sensors and can be readily improved by an order of magnitude through the use of an optimized transducer.
    Keywords: INSTRUMENTATION AND PHOTOGRAPHY
    Type: Applied Physics Letters (ISSN 0003-6951); 59; 1820-182
    Format: text
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  • 9
    Publication Date: 2013-08-31
    Description: Researchers designed and constructed a novel electron tunnel sensor which takes advantage of the mechanical properties of micro-machined silicon. For the first time, electrostatic forces are used to control the tunnel electrode separation, thereby avoiding the thermal drift and noise problems associated with piezoelectric actuators. The entire structure is composed of micro-machined silicon single crystals, including a folded cantilever spring and a tip. The application of this sensor to the development of a sensitive accelerometer is described.
    Keywords: INSTRUMENTATION AND PHOTOGRAPHY
    Type: National Aeronautics and Space Administration, Technology 2000, Volume 1; p 370-381
    Format: application/pdf
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  • 10
    Publication Date: 2013-08-31
    Description: The pneumatic infrared detector, originally developed by Golay in the late 1940s, uses the thermal expansion of one cm(exp 3) of xenon at room temperature to detect the heat deposited by infrared radiation. This detector was limited by thermal fluctuations within a 10 Hz bandwidth, but suffered from long thermal time constants and a fragile structure. Nevertheless, it represents the most sensitive room temperature detector currently available in the long wavelength infrared (LWIR). Fabrication of this type of detector on smaller scales has been limited by the lack of a suitably sensitive transducer. Researchers designed a detector based on this principle, but which is constructed entirely from micromachined silicon, and uses a vacuum tunneling transducer to detect the expansion of the trapped gas. Because this detector is fabricated using micromachining techniques, miniaturization and integration into one and two-dimensional arrays is feasible. The extreme sensitivity of vacuum tunneling to changes in electrode separation will allow a prototype of this detector to operate in the limit of thermal fluctuations over a 10 kHz bandwidth. A calculation of the predicted response and noise of the prototype is presented with the general formalism of thermal detectors. At present, most of the components of the prototype have been fabricated and tested independently. In particular, a characterization of the micromachined electron tunneling transducer has been carried out. The measured noise in the tunnel current is within a decade of the limit imposed by shot noise, and well below the requirements for the operation of an infrared detector with the predicted sensitivity. Assembly and characterization of the prototype infrared detector will be carried out promptly.
    Keywords: SPACECRAFT INSTRUMENTATION
    Type: Innovative Long Wavelength Infrared Detector Workshop Proceedings; p 197-207
    Format: application/pdf
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