Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
85 (1999), S. 3855-3859
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The influence of thermal conduction into the substrate during excimer laser ablation of thin film ZnS on silicon has been investigated. An analytical solution of the heat diffusion equation for a two-layer system has been used to calculate temperature profiles within the film and substrate arising from laser irradiation. The experimentally observed ablation rates are found to correlate with calculated surface temperatures, thereby demonstrating that thermal conduction into the substrate influences the ablation characteristics. Thus we are able to provide a simple predictive model for the ablation rate at any fluence incident on any thin film thickness. We find that for very thin films, optical interference effects reduce the energy coupled into the films and it is necessary to consider these within the model. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.369756
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