Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Solid state phenomena
Vol. 103-104 (Apr. 2005), p. 203-208
ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
In the first part of this paper, the main steps to consider in the build up of a particle measurement method on tool kit parts with a DIW/US protocol have been described. Through that methodology, measurement protocols achieving compromises between cleaning efficiency and minimal substrate erosion can be set up for tool parts. The adhesion problem of particles on a real rough substrate is then discussed solving DLVO theory equations considering physical and chemical analysis on surface and residual particles
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/21/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.103-104.203.pdf
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