Electronic Resource
Amsterdam
:
Elsevier
Sensors and Actuators A: Physical
45 (1994), S. 57-66
ISSN:
0924-4247
Keywords:
Electrostatic excitation and detection
;
Polysilicon resonators
;
Surface-micromachining techniques
;
Vacuum encapsulation
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0924-4247(94)00812-4
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