ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
X-ray diffraction analytical techniques have been used to investigate the influence of the deposition temperature (650–850 °C) on the composition and microstructure of the transition layers formed at the interface between titanium substrates and diamond thin films. The diamond coatings were produced by hot-filament chemical vapor deposition using a 1% methane/hydrogen mixture. X-ray diffraction analysis, performed both through θ–2θ scans and at grazing incidence, allowed investigation of the crystallographic properties and of the structural evolution of the various phases (TiC, TiH2, α-Ti) generated inside the intermediate reaction layers. The temperature-dependent orientation of diamond crystallites is discussed with reference to the complex structure of these interfacial layers. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.116977
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