Publication Date:
2016-08-05
Description:
0.07YO 1.5 -0.93HfO 2 (YHO7) films were prepared on various substrates by pulse laser deposition at room temperature and subsequent heat treatment to enable a solid phase reaction. (111)-oriented 10 wt. % Sn-doped In 2 O 3 (ITO)//(111) yttria-stabilized zirconia, (111)Pt/TiO x /SiO 2 /(001)Si substrates, and (111)ITO/(111)Pt/TiO x /SiO 2 /(001)Si substrates were employed for film growth. In this study, X-ray diffraction measurements including θ–2θ measurements, reciprocal space mappings, and pole figure measurements were used to study the films. The film on (111)ITO//(111)yttria-stabilized zirconia was an (111)-orientated epitaxial film with ferroelectric orthorhombic phase; the film on (111)ITO/(111)Pt/TiO x /SiO 2 /(001)Si was an (111)-oriented uniaxial textured film with ferroelectric orthorhombic phase; and no preferred orientation was observed for the film on the (111)Pt/TiO x /SiO 2 /(001)Si substrate, which does not contain ITO. Polarization–hysteresis measurements confirmed that the films on ITO covered substrates had saturated ferroelectric hysteresis loops. A remanent polarization ( P r ) of 9.6 and 10.8 μ C/cm 2 and coercive fields ( E c ) of 1.9 and 2.0 MV/cm were obtained for the (111)-oriented epitaxial and uniaxial textured YHO7 films, respectively. These results demonstrate that the (111)-oriented ITO bottom electrodes play a key role in controlling the orientation and ferroelectricity of the phase formation of the solid films deposited at room temperature.
Print ISSN:
0003-6951
Electronic ISSN:
1077-3118
Topics:
Physics
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