ISSN:
1572-9559
Keywords:
Schottky barrier diode
;
Micromachining
;
Terahertz circuits
;
Rectangular waveguide
;
Platinum Plating
;
Photolithography
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract Schottky barrier diodes have been integrated into on-chip rectangular waveguides. Two novel techniques have been developed to fabricate diodes with posts suitable for integration into waveguides. One technique produces diodes with anode diameters of the order of microns with post heights from 90 to 125 microns and the second technique produces sub-micron anodes with post heights around 20 microns. A method has been developed to incorporate these structures into a rectangular waveguide and provide a top contact onto the anode which could be used as an I.F. output in a mixer circuit. Devices have been fabricated and D.C. characterized.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1021734503826
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