ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Using a combination of synchrotron white beam x-ray topography (SWBXT) and highresolution x-ray diffraction (HRXRD), the structural quality of AlN crystals grown by varioussublimation-based techniques have been non-destructively analyzed. Spontaneously nucleated AlNcrystals are characterized by very low defect densities but their size is small. Self-seeding results innucleation of multiple grains of different orientations, a few of which are of good quality while mostare highly strained. Using readily available commercial 4H and 6H-SiC substrates, several growthruns have been carried out using different growth conditions to obtain thick AlN layers, eitherattached to the seed or free-standing. While attached layers are typically cracked and highly strained,crack-free free-standing layers can be obtained by delamination or SiC decomposition. X-raycharacterization reveals these crystals have good purity but moderately high defect densities
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.527-529.1521.pdf
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