ISSN:
1063-7826
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract The diffusion mass transfer of reagents under the conditions of local gas-phase epitaxy through a mask has been studied by the method of numerical modeling. The possible effect of adsorption of reagents on the surface of the mask and their surface diffusion on the local growth rate is studied. The computational results are compared with published experimental data.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1134/1.1187171
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