ISSN:
1432-0630
Keywords:
PACS: 42.62.Hk; 68.55.-a; 81.05.Tp; 81.15.Fg; 81.15.Lm
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
6 H5CH3, C6H6, and C6H5CH(CH3)2) to pulsed visible laser radiation of a copper vapor laser (λ=510.6 nm). The X-ray Auger electron spectroscopy (XAES), reflection high energy electron diffraction (RHEED), and Raman analysis are employed to characterize the deposited films. The sp3 fraction in deposited films amounts to 60–70% and depends on the precursor. The average film thickness on a glass substrate is about 100 nm. The films show excellent adherence, are transparent in the visible and have microhardness of 50–70 GPa, as measured by nanoindentor.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390050907
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