ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The effect of deposition rate and substrate temperature on the electrical resistivity (ρ), temperature coefficient of resistance (TCR) and thermolelectric power (TEP) of palladium films, in the thickness range 2 to 25 nm, is found to be marked. Higher rates of deposition and substrate temperatures are found to result in larger grains and hence changes in transport properties. The Fuchs-Sondheimer theory is used to explain the size effect in palladium films while the Mayadas-Shatzkes and Meyer relations are employed to study these effects onρ, TCR and TEP.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01058117
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