ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Poly(methyl α-chloroacrylate) (PMCA) and the copolymers of methyl methacrylate and methyl α-chloroacrylate (poly(MMA-co-MCA)) have been reported recently to be more susceptible to radiation degradation than poly(methyl methacrylate) (PMMA). In this paper we report our studies of PMCA and poly(MMA-co-MCA) as electron-sensitive positive resists. It has been found that both PMCA and the copolymers are more sensitive than PMMA. Using mixtures of dimethylformamide and 2-propanol as developers, the sensitivities of PMCA and poly(MMA-co-MCA) (38 mole percent MCA) have been found to be 1 × 10-5 and 6 × 10-6 coulomb/cm2, respectively. It has also been found that crosslinking predominates in PMCA when the electron dose exceeds 6 × 10-4 coulomb/cm2.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760170614
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