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  • 1
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    Method of producing an inertial sensor (2008)
    In:  CASI
    Details
    Publication Date: 2019-08-26
    Description: The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.
    Keywords: Instrumentation and Photography
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    NASA TECHNICAL REPORTS
  • 2
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    Multiple internal seal ring micro-electro-mechanical system vacuum packaging method (2008)
    In:  CASI
    Details
    Publication Date: 2019-08-26
    Description: A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.
    Keywords: Mechanical Engineering
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  • 3
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    Method of producing an integral resonator sensor and case (2005)
    In:  CASI
    Details
    Publication Date: 2019-08-17
    Description: The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.
    Keywords: Instrumentation and Photography
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  • 4
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    Interferometric system for precision imaging of vibrating structures (2001)
    In:  CASI
    Details
    Publication Date: 2019-08-17
    Description: An optical profiler is modified in a way which allows it to image a MEMS device at various points during the movement of the MEMS device. The light source is synchronized with a desired movement of the MEMS device. The light source produces pulse at each synchronization period. During each pulse, an interferometric measurement is carried out. So long as the pulse is short enough such that the device does not move significantly, a detection of the position of the device can be accurately obtained.
    Keywords: Optics
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  • 5
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    Isolated resonator gyroscope with a drive and sense plate (2006)
    In:  CASI
    Details
    Publication Date: 2019-08-15
    Description: The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
    Keywords: Physics (General)
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  • 6
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    Stereo Imaging Miniature Endoscope with Single Imaging Chip and Conjugated Multi-Bandpass Filters (2018)
    In:  CASI
    Details
    Publication Date: 2019-08-28
    Description: A dual objective endoscope for insertion into a cavity of a body for providing a stereoscopic image of a region of interest inside of the body including an imaging device at the distal end for obtaining optical images of the region of interest (ROI), and processing the optical images for forming video signals for wired and/or wireless transmission and display of 3D images on a rendering device. The imaging device includes a focal plane detector array (FPA) for obtaining the optical images of the ROI, and processing circuits behind the FPA. The processing circuits convert the optical images into the video signals. The imaging device includes right and left pupil for receiving a right and left images through a right and left conjugated multi-band pass filters. Illuminators illuminate the ROI through a multi-band pass filter having three right and three left pass bands that are matched to the right and left conjugated multi-band pass filters. A full color image is collected after three or six sequential illuminations with the red, green and blue lights.
    Keywords: Instrumentation and Photography
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  • 7
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    Parametrically disciplined operation of a vibratory gyroscope (2008)
    In:  CASI
    Details
    Publication Date: 2019-07-12
    Description: Parametrically disciplined operation of a symmetric nearly degenerate mode vibratory gyroscope is disclosed. A parametrically-disciplined inertial wave gyroscope having a natural oscillation frequency in the neighborhood of a sub-harmonic of an external stable clock reference is produced by driving an electrostatic bias electrode at approximately twice this sub-harmonic frequency to achieve disciplined frequency and phase operation of the resonator. A nearly symmetric parametrically-disciplined inertial wave gyroscope that can oscillate in any transverse direction and has more than one bias electrostatic electrode that can be independently driven at twice its oscillation frequency at an amplitude and phase that disciplines its damping to zero in any vibration direction. In addition, operation of a parametrically-disciplined inertial wave gyroscope is taught in which the precession rate of the driven vibration pattern is digitally disciplined to a prescribed non-zero reference value.
    Keywords: Instrumentation and Photography
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  • 8
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    Testing of Error-Correcting Sparse Permutation Channel Codes (2008)
    In:  CASI
    Details
    Publication Date: 2019-07-12
    Description: A computer program performs Monte Carlo direct numerical simulations for testing sparse permutation channel codes, which offer strong error-correction capabilities at high code rates and are considered especially suitable for storage of digital data in holographic and volume memories. A word in a code of this type is characterized by, among other things, a sparseness parameter (M) and a fixed number (K) of 1 or "on" bits in a channel block length of N.
    Keywords: Computer Systems
    Type: NPO-45196 , NASA Tech Briefs, September 2008; 60
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  • 9
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    Split-resonator integrated-post MEMS gyroscope (2004)
    In:  CASI
    Details
    Publication Date: 2019-07-12
    Description: A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.
    Keywords: Instrumentation and Photography
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  • 10
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    Disc resonator gyroscope fabrication process requiring no bonding alignment (2010)
    In:  CASI
    Details
    Publication Date: 2019-08-26
    Description: A method of fabricating a resonant vibratory sensor, such as a disc resonator gyro. A silicon baseplate wafer for a disc resonator gyro is provided with one or more locating marks. The disc resonator gyro is fabricated by bonding a blank resonator wafer, such as an SOI wafer, to the fabricated baseplate, and fabricating the resonator structure according to a pattern based at least in part upon the location of the at least one locating mark of the fabricated baseplate. MEMS-based processing is used for the fabrication processing. In some embodiments, the locating mark is visualized using optical and/or infrared viewing methods. A disc resonator gyroscope manufactured according to these methods is described.
    Keywords: Mechanical Engineering
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