ISSN:
1573-8906
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
Notes:
Abstract The technology of manufacturing precision silicon integrated pressure transducers by the methods of traditional planar large-scale integration technology is considered. By employing an advanced construction and technology of the sensitive element and a temperature compensation circuit, a high acceptance ratio yield and good metrological characteristics are obtained.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00976743
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