ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Electron resist properties of three vinylaromatic polymers, polystyrene, polyvinylcarbazole and poly(3-bromo-N-vinylcarbazole) have been examined. Polystyrene and polyvinylcarbazole are high contrast resists of high dry etch resistance, but for adequate sensitivity (Dg0.5 ≤ ca. 10 μC/cm2 at 25 kV) high molecular weights are needed (Mw ≥ 106). Poly(3-brotno-N-vinylearbazole) has a much higher sensitivity (Dg0.5 = ca. 2 μC/cm2) than the unsubstituted polymer. The sensitivity of polystyrene and polyvinylcarbazole is increased appreciably by addition of organic bisazides as crosslinking agents, e.g. a sensitivity increase of almost an order of magnitude was found upon addition of 3% 4, 4′-diazidostilbene to polystyrene, high contrast being maintained.
Additional Material:
11 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760201609
Permalink
