Publication Date:
2019-07-12
Description:
Multilayer W-C diffraction gratings with nominal d spacings of 35 A have been fabricated by magnetron sputter deposition. The peak and integrated reflectivities of these films have been measured with Al K-alpha X-rays and compared to theoretical values. The rms surface roughness has been evaluated. The influence of several sputtering-system process parameters on the reflectivities has been investigated.
Keywords:
OPTICS
Type:
Journal of Vacuum Science and Technology A (ISSN 0734-2101); 4; 641-644
Format:
text
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