ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
A thick film anemometer for in situ control of the flow rate in fluidic systems wasdesigned, manufactured and characterized. The sensor is integrated in a retention modulusconsisting of Low Temperature Cofired Ceramics (LTCC). These materials allow the cost-effectiverealisation of fluidic microsystems with integrated electronics. The challenge of the work is todesign an anemometer under the exclusive use of thick film technologies. The necessity to trimresistors causes the external use of relevant pastes. Therefore, the use inside of a closed fluidicsystem requires the leak of process gases and, at the same time, a maximal heat-insulating of thesensor element from the substrate. Free-standing elements necessitate the control of stress due toshrinking mismatch, TCE mismatch, density gradients and deformation during the lamination. Inthe presented solution, embossed flue channels prevent blow forming on a free-standing bridge. Theanemometer has a linear sensor characteristic for flow rates up to 0.1 ml/min. The layout guaranteesthat the fluid gets only in contact with the basic ceramic material, which is compatible with a widerange of biological substances. Therefore the sensor is applicable in contact with cell fluids or PCRreagents
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.54.401.pdf
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