Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
72 (1992), S. 4308-4312
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The simulation of soft-x-ray (λ=1.33–14.0 nm) -diffraction behavior at 2θ=90° of W/C and W/Si multilayers with sublayer thickness ratio (composition) deviation in periods is presented. The results show that when the deviation Δx≥0 (which means that the thickness fraction x=d1/d increases from the top to the bottom of the multilayers, where d1 is the thickness of the heavy element sublayer and d the period of the multilayer), (i) in the case of W/Si where the W and Si absorption coefficients are close the diffraction intensities decrease in general, while in the case of W/C where the W and C absorption coefficients are close the increase of the diffraction intensities can reach about 20%; (ii) the full-width at half-maximum of the diffraction peak always decreases; (iii) the peak position tends to move to the small-angle side.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.352193
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