ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Characterization of post implantation annealing steps is done by extracting the activationand compensation data of implanted Al atoms. Usually, this is done by Hall measurements. Thepreparation of Hall samples and temperature dependent Hall measurements, however, are rathercomplex compared to, e.g., temperature dependent resistivity measurements by 4-point probing.Therefore, a model for extracting relevant electrical parameters from resistivity data has been developed.The model is based on the neutrality equation and a temperature dependent mobility model
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/13/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.527-529.827.pdf
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