ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Silicon Carbide has proven its relevance for various MEMS and sensors devicesapplications. This paper presents the fabrication and the first test results of 3C-SiC electrostaticresonators actuated by applying a combination of AC and DC voltages. The recipe used for thefabrication has taken the advantage of the starting material, 3C-SiC grown on Si, which allows us touse the Si substrate as sacrificial layer to release the structures. Resonators have been fabricated by atwo-step process, combining RIE ICP etching with HF wet etching. Resonators have beensuccessfully electrostatically actuated in air-ambient condition. The resonance frequencies wereclearly identified, although capacitive current created by actuation was not detected
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/17/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.556-557.949.pdf
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