ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
In this study, a high performance peristaltic micropump has been developed andinvestigated. The micropump has three cylinder chambers which are connected through microchannelsand two normally closing active membrane valves at inlet/outlet for high pumpingpressure performance. A circular shaped miniature LIPCA has been developed and manufacturedfor actuating diaphragms. In this LIPCA, a 0.1mm thickness PZT ceramic is used as an active layer.As a result, the actuator has shown to produce large out-of-plane deflection and consumed lowpower. During the design process, a coupled field analysis was conducted to predict the actuatingbehavior of a diaphragm. The actuator behavior was investigated both theoretically andexperimentally. In addition, MEMS technique was used to fabricate the peristaltic micropump.Judging from experimental flow rate and pumping pressure results, the present peristalticmicropump has higher performance than the same kind of micropump developed elsewhere
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/41/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.47-50.726.pdf
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